US9072 Series Silicon Pressure Sensor Die
Specification
Type of pressure | Absolute type or gauge type |
Dimension | 1.5mm × 1.5mm × 1.1mm |
Pressure medium | Air or non-corrosive gas |
| Min | Nominal | Max | Unit |
Excitation Voltage | -- | 5 | 10 | V |
Excitation Current | -- | 1.00 | 2.00 | mA |
Bridge Impedance | 4 | 5 | 6 | kΩ |
Span1 | | | | |
60psi | 75 | 100 | 125 | mV |
100psi | 75 | 100 | 125 | mV |
300psi | 120 | 150 | 180 | mV |
800psi | 170 | 200 | 230 | mV |
1200psi | 260 | 300 | 340 | mV |
Offset | -30 | ±10 | +30 | mV |
TC Span2 | -0.17 | -0.22 | -0.27 | %FS/℃ |
TC Offset2 | -0.08 | -0.02 | +0.08 | %FS/℃ |
Linearity3 | -0/3 | ±0.05 | +0.3 | %FS |
Hysteresis | -0.3 | ±0.1 | +0.3 | %FS |
Proof pressure | | | 2x | |
